Equipment Details


Name of the EquipmentSpray Pyrolysis System
GroupCrystalline Silicon Solar Cells
Categorysemi clean a
OperatorPankaj Kumar
Kalaivani S
System OwnerKalaivani S
124070001@iitb.ac.in

Make / ModelHolmarc/ HO-TH-04
InformationAluminium oxide coating system
Serial NumberNA
FootPrintNA
InstallationDate06/05/2015
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Not Required
Local DealerJim

Jim Jose Manager-Sales Holmarc Opto-Mechatronics Pvt Ltd B-7, H.M.T Industrial Estate, HMT P.O Kalamassery, Kochi - 683 503 Kerala , India .
Actual DealerHolmarc

Jim Jose Manager-Sales Holmarc Opto-Mechatronics Pvt Ltd B-7, H.M.T Industrial Estate, HMT P.O Kalamassery, Kochi - 683 503 Kerala , India .
SOP SOP/70_SOP.pdf
Training & other policy documentsPOLICY/70_POLICY.pdf
Recipies RECEPIES/70_RECEPIES.pdf
Glimpse GLIMPSE/70_GLIMPSE.pdf
Tool Facilities RequirementsN2 and O2 gas
AccessOpen
Lab Phone No4489 Ext Flash 1
Substrate allowedRCA cleaned Si Wafer
Substrate Dimension> = 2 inch Si wafer
Chemical allowedAl2O3, TiO2, Al2O3, SiO2, TiO2 -High purity > 99.99% precursors
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedN2, O2
Contamination remarksOnly RCA cleaned Si substrate is allowed. No glass substrate is allowed.