Equipment Details


Name of the EquipmentRCA Wet Bench
GroupCrystalline Silicon Solar Cells
Categoryclean pv
Operator
System OwnerSreejith K P
133076005@iitb.ac.in

Sandeep Kumbhar
sandeepk@ee.iitb.ac.in

Make / ModelLaxmi Instruments
InformationFor performing RCA processes
Serial NumberNA
FootPrintNA
InstallationDate
Equipment TypeWet chemistry tools
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerNA

NA
Actual DealerNA

NA
SOP SOP/65_SOP.pdf
Training & other policy documentsPOLICY/65_POLICY.pdf
Recipies RECEPIES/65_RECEPIES.pdf
Glimpse GLIMPSE/65_GLIMPSE.pdf
Tool Facilities RequirementsDIW
AccessOpen
Lab Phone No4489 Ext Flash 1
Substrate allowedSi
Substrate DimensionMinimum: 2 inch and Maximum: 5 Inch x 5 Inch
Chemical allowedNH4OH,HCL,H2O2,HF, Bare Si wafers and processed samples with Si as starting wafer
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedNA
Contamination remarksClean