Equipment Details


Name of the EquipmentEtching Wet Bench
GroupCrystalline Silicon Solar Cells
Categorysemi-clean pv
OperatorSandeep Kumbhar
System OwnerSandeep Kumbhar
sandeepk@ee.iitb.ac.in

Make / ModelLaxmi Instruments
InformationFor performing etching processes
Serial NumberNA
FootPrintNA
InstallationDate04/12/2013
Equipment TypeWet chemistry tools
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerNA

NA
Actual DealerNA

NA
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4489 Ext Flash 1
Substrate allowedSilicon
Substrate Dimensionquarter of 2
Chemical allowedNaOH, KOH, Hf, IPA., Si
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarks1.Gold contaminated samples are not allowed. 2.Processed samples will be Considered as a Na, K contaminated.