Equipment Details


Name of the EquipmentEdge Isolation Tool
GroupCrystalline Silicon Solar Cells
Categoryclean
Operator
System OwnerSandeep Kumbhar
sandeepk@ee.iitb.ac.in

Make / ModelBSET EQ/ NT-2
InformationPlasma etching of diffused wafers
Serial Number1027
FootPrint1.5m x 1m
InstallationDate10/01/2012
Equipment TypeDry Etch tools
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerDeesha Enterprises

B.S Pai, bspai@vsnl.com
Actual DealerBSET EQ Plasma

Bill Smith, bseteq@comcast.net
SOP SOP/52_SOP.pdf
Training & other policy documentsPOLICY/52_POLICY.pdf
Recipies RECEPIES/52_RECEPIES.pdf
Glimpse GLIMPSE/52_GLIMPSE.pdf
Tool Facilities RequirementsGases, chiller (if required)
AccessControlled
Lab Phone No4489 Ext Flash 1
Substrate allowedSi
Substrate Dimension125x125mm wafers and 156x156mm wafers
Chemical allowedNA, Si, SiN, SiO2
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedCF4, SF6, N2
Contamination remarksAny other sample beyond the mentioned list needs due contamination clearance