Equipment Details


Name of the EquipmentDiffusion Furnace
GroupCrystalline Silicon Solar Cells
Categoryclean pv
OperatorSandeep Kumbhar
System OwnerNCPRE
ncpreit@ee.iitb.ac.in

Sandeep Kumbhar
sandeepk@ee.iitb.ac.in

Make / ModelProtemp SIRIUS/ PRO-2005
InformationPhosphorus diffusion and oxidation
Serial NumberRef. Tender No. MNRE
FootPrint20 feet * 4 feet
InstallationDate06/30/2012
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerOhm scientific

Ohm scientific Dr.Anand Vairagar Chintan patel
Actual DealerProtemp USA

Robert Gray Vice President, Sales & Marketing ProTemp Product, Inc. 3511 Thomas Rd., Unit 4 Santa Clara, CA 95054 Tel: 408-855-8222 x102 Fax: 408-855-8224 www.protempproducts.com
SOP SOP/51_SOP.pdf
Training & other policy documentsPOLICY/51_POLICY.pdf
Recipies RECEPIES/51_RECEPIES.pdf
Glimpse GLIMPSE/51_GLIMPSE.pdf
Tool Facilities RequirementsGN2, N2, O2, Scrubber, exhaust
AccessOpen
Lab Phone No4489 Ext Flash 1
Substrate allowedSi
Substrate Dimension4 inch circular, 5 inch pseudo square, 6 inch pseudo square
Chemical allowedPOCl3, BBr3, Crystalline (mono,multi,monolike) Si, solar grade silicon
Precursors/ Targets available
*Based on stock availability
Silicon
Precursor/ Target loaded inside tool
Target dimension5inch, 6 inch square and pseudosquare wafers
Gases allowedN2, O2
Contamination remarksSamples have to be RCA cleaned before doing any diffusion run. The furnace processes wafers that are textured and saw damage removed in KOH