Equipment Details


Name of the Equipment4 Target E Beam Evaporator System
GroupCrystalline Silicon Solar Cells
Categorysemi-clean pv
Operatorjayshree bhajipale
Kalaivani S
Swasti Bhatia
System OwnerKalaivani S
124070001@iitb.ac.in

Make / ModelHHV/15F6T
InformationThin film coating system
Serial NumberNA
FootPrintNA
InstallationDate05/03/2013
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerHHV Mumbai

Mr. B.S.C. Bose, HHV Mumbai contact:02225213724
Actual DealerMr. B.S.C. Bose

02225705719
SOP SOP/47_SOP.pdf
Training & other policy documentsPOLICY/47_POLICY.pdf
Recipies
Glimpse
Tool Facilities RequirementsN2, Chillar
AccessOpen
Lab Phone No4489 Ext Flash 1
Substrate allowedAny solid substrate
Substrate DimensionMin-20mm x 20mm Max-155mm x 155mm
Chemical allowedFor cleaning of the system IPA is used., Si
Precursors/ Targets available
*Based on stock availability
Al, Ag, Ti, Pd, Pt
Precursor/ Target loaded inside toolNA
Target dimensionTargets must be solid form
Gases allowedLiquid N2
Contamination remarksBefore process substrate holder and chamber cleaning is required