Equipment Details


Name of the Equipment2 inch Annealing Furnace
GroupCrystalline Silicon Solar Cells
Categorysemi clean a
Operator
System OwnerKalaivani S
124070001@iitb.ac.in

Make / ModelUrjas Furnace
InformationBoron, Phosphorus and Annealing Furnace
Serial NumberNA
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Not Required
Local DealerNA

NA
Actual DealerNA

NA
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsNA
AccessOpen
Lab Phone No4489 Ext Flash 1
Substrate allowedNA
Substrate DimensionNa
Chemical allowedNA, Si, Al203
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedo2, n2
Contamination remarksNA