Equipment Details


Name of the EquipmentAutolab System
GroupThin Film Materials and Devices
Categoryclean
Operator
System Owner
Make / Model
Information
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE devices and interfaces lab Second floor, Transit building
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4898
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks