Equipment Details


Name of the EquipmentEnvironmental chamber (Large size)
GroupModule Reliability
Categoryclean
Operator
System OwnerDevan P Vasudevan
devanpvasudevan@iitb.ac.in

Rajiv Dubey
rajiv.knit.09@gmail.com

Make / ModelBallice BS-4500-WC
InformationReliability tests for modules
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-2
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4871
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks