Equipment Details


Name of the EquipmentLithography
GroupEducation and Training
Categoryclean
OperatorNilesh Kusher
System OwnerNilesh Kusher
nileshkusher@iitb.ac.in

manisha bansode
manishak@iitb.ac.in

Make / ModelIndigineous
InformationPatterning through masks
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE students fabrication lab Second floor, Transit building
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4872
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks