Equipment Details


Name of the Equipment2 Inch Phosphorus Diffusion,oxidation Furnace
GroupEducation and Training
Categoryclean
OperatorNilesh Kusher
System OwnerNilesh Kusher
nileshkusher@iitb.ac.in

manisha bansode
manishak@iitb.ac.in

Make / ModelUrjas Energy Solutions
InformationIs used for diffusion and oxidation
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE students fabrication lab Second floor, Transit building
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4872
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks