Equipment Details


Name of the EquipmentOE Lab Plasma Asher
GroupThin Film Materials and Devices
Categorytbd
OperatorSaranya Ajesh
System OwnerGangadhar S B
gangadharsb@iitb.ac.in

Bosky Sharma
154366001@iitb.ac.in

Make / ModelHARRICK PLASMA/ PDC-32G-2/PDC/FMG-2
Information
Serial NumberPDC-32G-2
FootPrint118 cm x 75.2 cm
InstallationDate25/09/2014
Equipment TypeMiscellaneous
LocationNCPRE Hybrid Solar Cells lab
AMC Required
Local Dealer

Actual DealerHarrick Plasma, Inc.

Harrick Plasma, Inc. 120 Brindley St. Ithaca, NY USA (607)272 5070 info@harrickplasma.com
SOP SOP/1_SOP.pdf
Training & other policy documentsPOLICY/1_POLICY.pdf
Recipies
Glimpse
Tool Facilities Requirementsvacuum Pump, Oxygen cylinder gas
AccessControlled
Lab Phone No4481
Substrate allowedSi/ Glass/ ITO Glass
Substrate Dimension1cm to max 2 inch
Chemical allowedIPA only for chamber cleaning., ITO Glass, glass substrate
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedO2
Contamination remarks