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Equipment Details

Name of the Equipment
Edge Isolation Tool
Group
Crystalline Silicon Solar Cells
Category
clean
Operator
System Owner
Ajin Raphy
ajinraphy@iitb.ac.in

Make / ModelBSET EQ/ NT-2
InformationNo
Serial Number1027
FootPrint1.5m x 1m
InstallationDate10/01/2012
Equipment TypeDry Etch tools
LocationNCPRE Fab lab (2nd Floor, NanoE Building)
AMC Required
Local DealerDeesha Enterprises

B.S Pai, bspai@vsnl.com
Actual DealerBSET EQ Plasma

Bill Smith, bseteq@comcast.net
SOP SOP/52_SOP.pdf
Training & other policy documentsPOLICY/52_POLICY.pdf
Recipies RECEPIES/52_RECEPIES.pdf
Glimpse GLIMPSE/52_GLIMPSE.pdf
Tool Facilities RequirementsGases, chiller (if required)
AccessControlled
Lab Phone No3583
Substrate allowedSi
Substrate Dimension125x125mm wafers and 156x156mm wafers
Chemical allowedNA, Si, SiN, SiO2
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside tool4
Target dimensionNA
Gases allowedCF4, SF6, N2
Contamination remarksAny other sample beyond the mentioned list needs due contamination clearance