Name of the Equipment | Lithography |
Group | Education and Training |
Category | clean |
Operator | |
System Owner | |
| Make / Model | Indigineous |
| Information | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE students fabrication lab Second floor, Transit building |
| AMC | Required |
| Local Dealer | Holmarc |
| Actual Dealer | |
| SOP | SOP/25_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | Yellow lamp, Fume hood |
| Access | Open |
| Lab Phone No | 3577 |
| Substrate allowed | Silicon and glass |
| Substrate Dimension | 2 inch Silicon |
| Chemical allowed | ppr, Developer, TMAH, Acetone, IPA, NA |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | N2 for cleaning sample |
| Contamination remarks | clean |