Name of the Equipment | DI Water System |
Group | |
Category | clean |
Operator | |
System Owner | NCPRE Admin ncpreit@ee.iitb.ac.in |
| Make / Model | ELIX 35 |
| Information | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | Merck Life Science Private Limited Merck Life Science Private Limited 8th Floor, Godrej One, Pirojshanagar, Eastern Express Highway, Vikhroli (E), Mumbai- 400079. India Tel: +91 22 6210 9800 Fax : +91 22 6663 9893 |
| Actual Dealer | Merck Life Science Private Limited Merck Life Science Private Limited 50A, 2nd Phase, Ring Road Bangalore, Peenya 560 058. India Tel: +91-80-39224000, 39224001 |
| SOP | SOP/124_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets available *Based on stock availability | |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |