Name of the Equipment | Spectroscopic Ellipsometer |
Group | |
Category | clean pv |
Operator | Keerthana Venugopal |
System Owner | Keerthana Venugopal 30005089@iitb.ac.in |
| Make / Model | SE-2000 |
| Information | No |
| Serial Number | 2059 |
| FootPrint | 1.53m x 0.87m x 1.51 m |
| InstallationDate | 16-04-2018 |
| Equipment Type | Material and structural characterization tools |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Required |
| Local Dealer | Mr. S.G. Hirlekar SIMCO GLOBAL TECHNOLOGY & SYSTEMS LTD Mr. S.G. Hirlekar : 9820106336 SIMCO GLOBAL TECHNOLOGY & SYSTEMS LTD 409, Thacker Tower, Plot no. 86,Sector-17, Vashi, Navi Mumbai-400705 Maharashtra, INDIA. Tel.: 91-22-27801176, 67910945 E-mail: simcoltdmumbai@vsnl.com / simco.mum@simcogroup.in |
| Actual Dealer | Semilab Semiconductor Physics Laboratory, Co. Ltd H-1117 Budapest, prielle kornelia utca 2.,Hungary phone +3615054690. E-mail ID : semilab@semilab.hu |
| SOP | SOP/121_SOP.pdf |
| Training & other policy documents | POLICY/1_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/1_GLIMPSE.pdf |
| Tool Facilities Requirements | CDA |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | Si, glass |
| Substrate Dimension | Maximum - 6 inch |
| Chemical allowed | NA, Only materials under clean PV category are allowed. Gold, Cu contaminated samples not allowed. |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 1 |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | Clean PV |